Electro Static Chuck

SHINKO designs ceramic electrostatic chucks which are widely used for wafer processing (etching, CVD), LCD processing etc.
SHINKO offers high quality, low price, short delivery times and manufactures using consistent production process such as firing and forming of ceramic, assembly and inspection.
SHINKO supports to ensure the success of customer's needs.

Concept |
Features |
Structure |
Uses |

Concept

We can supply the most suitable ceramic electro static chuck(ESC) that is adapted to customer's needs by using technology developed by SHINKO for many years.
We can propose design and machining that corresponds to our equipment in the manufacture of electro static chucks.

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Feature

Material : Alumina ceramic
Dimension : Max size ø450mm
Ceramic thick : 0.8∼15.0mm
Temperature : -20°C∼ +300°C (We can correspond until 500°C)
Surface : We have the ability to offer Helium groove machining, emboss surface
and optional surface roughness for wafer cooling by Helium.

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Structure

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Uses

Wafer process : Etching, Ashing, CVD, PVD
FPD process
Transfer tools

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